@inproceedings{2beceed0b4bd45a38fa8c342aac78e1e,
title = "Advancing Semiconductor Manufacturing through DNA-Templated Lithography and Molecular-Scale Patterning of 2D Materials",
abstract = "This paper explores the potential of using DNA nanostructure to pattern molybdenum disulfide (MoS2) for potential applications in nanoelectronics. We developed a gas phase synthesis of MoS2 with minimal out-of-plane growth and low defect density. We used density functional theory (DFT) calculation to examine the bandgap modulation of MoS2 due to counterion diffusion from DNA, highlighting the electron transfer mechanism during lithium intercalation. Lastly, we demonstrate deposition of DNA triangles and nanotubes on various MoS2 surfaces. Contrary to previous results, we found that these DNA nanostructures maintained their structural stability. These findings collectively contribute valuable insights into using DNA nanotechnology to advance 2D electronics.",
keywords = "2d materials, DNA origami, MoS, doping, nanoelectronics",
author = "Anumita Kumari and Michael Curtis and Arpan De and Haitao Liu and David Estrada and Anantram, {M. P.}",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 21st Annual IEEE Workshop on Microelectronics and Electron Devices, WMED 2024 ; Conference date: 29-03-2024",
year = "2024",
doi = "10.1109/WMED61554.2024.10534135",
language = "English",
series = "IEEE Workshop on Microelectronics and Electron Devices, WMED",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "WMED 2024 - 2024 IEEE WMED Workshop on Microelectronics and Electron Devices",
}