Alternate method of TDDB study for aluminum oxide using magneto-resistance

Santosh Kumar, William B. Knowlton

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A sensitive and accurate method/test to predict the lifetime of aluminum oxide used as a tunnel barrier in magnetic random access memory (MRAM) has been devised. The performance of magnetic tunnel junction is dependent upon the lifetime of aluminum oxide. Aluminum oxide has also been used in high dielectric constant gate dielectric MOS devices suitable for high speed applications. This method relies upon the measurement of anti parallel and parallel resistance of the magnetic stack in a tunnel magneto resistor using aluminum oxide as a tunnel barrier. This is a more sensitive method than the conventional methods.

Original languageEnglish
Title of host publication2002 IEEE International Integrated Reliability Workshop Final Report, IRW 2002
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages180-183
Number of pages4
ISBN (Electronic)0780375580
DOIs
StatePublished - 2002
EventIEEE International Integrated Reliability Workshop Final Report, IRW 2002 - Lake Tahoe, United States
Duration: 21 Oct 200224 Oct 2002

Publication series

NameIEEE International Integrated Reliability Workshop Final Report
Volume2002-January
ISSN (Print)1930-8841
ISSN (Electronic)2374-8036

Conference

ConferenceIEEE International Integrated Reliability Workshop Final Report, IRW 2002
Country/TerritoryUnited States
CityLake Tahoe
Period21/10/0224/10/02

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