Atomic Layer Deposition of Molybdenum Disulfide Films Using MoF6 and H2S
- Anil U. Mane
- , Steven Letourneau
- , David J. Mandia
- , Jian Liu
- , Joseph A. Libera
- , Yu Lei
- , Qing Peng
- , Elton Graugnard
- , Jeffrey W. Elam
- Argonne National Laboratory
- Boise State University
- Northwestern University
Research output: Contribution to journal › Article › peer-review
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