Chip-Scale Nanophotonic Chemical and Biological Sensors Using CMOS Process

  • Lincoln Bollschweiler
  • , Alex English
  • , R. Jacob Baker
  • , Wan Kuang
  • , Zi-Chang Chang
  • , Ming-Hsiung Shih
  • , William Knowlton

Research output: Contribution to journalArticlepeer-review

4 Scopus citations
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Abstract

A monolithic integrated chip-scale surface plasmon resonance (SPR) sensor is demonstrated. The device consists of a pn photodiode covered with a periodic modified thin metal film whose lattice constant is on the order of the wavelength of light. The device performs real-time measurement of resonant wavelengths of enhanced optical transmission due to surface plasmon resonance, which are influenced by the presence of chemical or biological materials at the device’s surface.

Original languageAmerican English
Journal52nd IEEE International Midwest Symposium on Circuits and Systems (MWSCAS '09)
DOIs
StatePublished - 1 Aug 2009

Keywords

  • surface plasmon polariton
  • photodiode
  • sensor
  • CMOS transimpedance amplifier

EGS Disciplines

  • Electrical and Computer Engineering

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