Complex, 3D photonic crystals fabricated by Atomic Layer Deposition

J. S. King; D. Gaillot; T. Yamashita; C. Neff; E. Graugnard; C. J. Summers

Complex, 3D photonic crystals fabricated by Atomic Layer Deposition

J. S. King, D. Gaillot, T. Yamashita, C. Neff, E. Graugnard, C. J. Summers

Micron School of Materials Science and Engineering

Georgia Institute of Technology

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

The potential of atomic layer deposition (ALD) for the fabrication of advanced luminescent photonic crystal (PC) was demonstrated. Two and three-layer inverse opals were formed by the deposition of thin layers of ZnS:Mn and TiO₂ in stacked configuration. Evidence for modification of the emission characteristics by high order photonic bandgap (PBG) was given. The structures were characterized by specular reflectance and transmission, photoluminescence and scanning electron microscopy.

Original language	English
Article number	DD12.2
Pages (from-to)	315-320
Number of pages	6
Journal	Materials Research Society Symposium Proceedings
Volume	846
State	Published - 2005
Event	2004 MRS Fall Meeting - Boston, MA, United States Duration: 28 Nov 2004 → 3 Dec 2004

Cite this

@article{a59268eb19aa47e795319e6de3edf062,

title = "Complex, 3D photonic crystals fabricated by Atomic Layer Deposition",

abstract = "The potential of atomic layer deposition (ALD) for the fabrication of advanced luminescent photonic crystal (PC) was demonstrated. Two and three-layer inverse opals were formed by the deposition of thin layers of ZnS:Mn and TiO2 in stacked configuration. Evidence for modification of the emission characteristics by high order photonic bandgap (PBG) was given. The structures were characterized by specular reflectance and transmission, photoluminescence and scanning electron microscopy.",

author = "King, {J. S.} and D. Gaillot and T. Yamashita and C. Neff and E. Graugnard and Summers, {C. J.}",

year = "2005",

language = "English",

volume = "846",

pages = "315--320",

journal = "Materials Research Society Symposium Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "2004 MRS Fall Meeting ; Conference date: 28-11-2004 Through 03-12-2004",

}

TY - JOUR

T1 - Complex, 3D photonic crystals fabricated by Atomic Layer Deposition

AU - King, J. S.

AU - Gaillot, D.

AU - Yamashita, T.

AU - Neff, C.

AU - Graugnard, E.

AU - Summers, C. J.

PY - 2005

Y1 - 2005

N2 - The potential of atomic layer deposition (ALD) for the fabrication of advanced luminescent photonic crystal (PC) was demonstrated. Two and three-layer inverse opals were formed by the deposition of thin layers of ZnS:Mn and TiO2 in stacked configuration. Evidence for modification of the emission characteristics by high order photonic bandgap (PBG) was given. The structures were characterized by specular reflectance and transmission, photoluminescence and scanning electron microscopy.

AB - The potential of atomic layer deposition (ALD) for the fabrication of advanced luminescent photonic crystal (PC) was demonstrated. Two and three-layer inverse opals were formed by the deposition of thin layers of ZnS:Mn and TiO2 in stacked configuration. Evidence for modification of the emission characteristics by high order photonic bandgap (PBG) was given. The structures were characterized by specular reflectance and transmission, photoluminescence and scanning electron microscopy.

UR - http://www.scopus.com/inward/record.url?scp=23844442850&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:23844442850

SN - 0272-9172

VL - 846

SP - 315

EP - 320

JO - Materials Research Society Symposium Proceedings

JF - Materials Research Society Symposium Proceedings

M1 - DD12.2

T2 - 2004 MRS Fall Meeting

Y2 - 28 November 2004 through 3 December 2004

ER -

Complex, 3D photonic crystals fabricated by Atomic Layer Deposition

Abstract

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