Confocal Raman spectroscopy and AFM for evaluation of sidewalls in type II superlattice FPAs

T. J. Rotter, T. Busani, P. Rathi, F. Jaeckel, P. A. Reyes, K. J. Malloy, A. A. Ukhanov, E. Plis, S. Krishna, M. Jaime-Vasquez, N. F. Baril, J. D. Benson, D. A. Tenne

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

We propose to utilize confocal Raman spectroscopy combined with high resolution atomic force microscopy (AFM) for nondestructive characterisation of the sidewalls of etched and passivated small pixel (24 μm×24 μm) focal plane arrays (FPA) fabricated using LW/LWIR InAs/GaSb type-II strained layer superlattice (T2SL) detector material. Special high aspect ratio Si and GaAs AFM probes, with tip length of 13 μm and tip aperture less than 7°, allow characterisation of the sidewall morphology. Confocal microscopy enables imaging of the sidewall profile through optical sectioning. Raman spectra measured on etched T2SL FPA single pixels enable us to quantify the non-uniformity of the mesa delineation process.

Original languageEnglish
Article number94510R
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume9451
Issue numberJanuary
DOIs
StatePublished - 2015
Event41st Conference on Infrared Technology and Applications - Baltimore, United States
Duration: 20 Apr 201523 Apr 2015

Keywords

  • AFM
  • Confocal Raman spectroscopy
  • Dual-band imaging
  • Focal Plane Array
  • InAs/GaSb Superlattice
  • Infrared Detection

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