Dispersion Control in Two-Dimensional Superlattice Photonic Crystal Slab Waveguides by Atomic Layer Deposition

D. P. Gaillot, Elton Graugnard, J. Blair, C. J. Summers

Research output: Contribution to journalArticlepeer-review

18 Scopus citations

Abstract

The frequency and dispersion of photonic bands in two-dimensional triangular-based superlattice photonic crystal Si slab waveguides were manipulated using atomic layer deposition. The samples were conformally coated with increasing thicknesses of TiO2 and characterized by polarized angular-dependent reflectance measurements, which revealed shifts in the photonic band frequencies of 16% as well as continuous changes in band dispersion. The ability to tune toward zero group velocity by tuning band repulsion between same-polarization bands is demonstrated. Finite-difference time-domain calculations, combined with a dielectric weighting model, were used to assess the observed band and dispersion tuning.

Original languageAmerican English
Article number181123
JournalApplied Physics Letters
Volume91
Issue number18
DOIs
StatePublished - 29 Oct 2007

Keywords

  • atomic layer deposition
  • band structure
  • disperse systems
  • elemental semiconductors

EGS Disciplines

  • Materials Science and Engineering

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