Abstract
The frequency and dispersion of photonic bands in two-dimensional triangular-based superlattice photonic crystal Si slab waveguides were manipulated using atomic layer deposition. The samples were conformally coated with increasing thicknesses of TiO2 and characterized by polarized angular-dependent reflectance measurements, which revealed shifts in the photonic band frequencies of 16% as well as continuous changes in band dispersion. The ability to tune toward zero group velocity by tuning band repulsion between same-polarization bands is demonstrated. Finite-difference time-domain calculations, combined with a dielectric weighting model, were used to assess the observed band and dispersion tuning.
Original language | American English |
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Article number | 181123 |
Journal | Applied Physics Letters |
Volume | 91 |
Issue number | 18 |
DOIs | |
State | Published - 29 Oct 2007 |
Keywords
- atomic layer deposition
- band structure
- disperse systems
- elemental semiconductors
EGS Disciplines
- Materials Science and Engineering