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Electron Hop Funnel Measurements and Comparison with the Lorentz-2E Simulation

  • Micron Technology
  • Boise State University

Research output: Contribution to journal › Article › peer-review

4 Scopus citations
16 Downloads (Pure)

Abstract

Electron hop funnels have been fabricated using a Low Temperature Co-Fired Ceramic (LTCC). Measurements of the hop funnel I-V curve and electron energy distribution have been made using gated field emitters as the electron source. The charged particle simulation Lorentz 2E has been used to model the hop funnel charging and to predict the I-V and energy characteristics. The results of this comparison indicate that the simulation can be used to design hop funnel structures for use in various applications.

Original languageAmerican English
Pages (from-to)555-561
Number of pages7
JournalIEEE Transactions on Plasma Science
Volume39
Issue number1
Early online date15 Nov 2010
DOIs
StatePublished - Jan 2011

Keywords

  • electron emission
  • surface charging
  • vacuum microelectronics

EGS Disciplines

  • Electrical and Computer Engineering

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