Erosion of low-temperature co-fired ceramics in a radio frequency inductively coupled plasma

A. Miller, D. Plumlee, J. Browning, A. Moll

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

To expand research in space-based micropropulsion, Boise State University is developing an ion-propulsion system designed in Low Temperature Co-fired Ceramics (LTCC). To evaluate the suitability of this materials system for an ion-propulsion system, a Design of Experiments (DOE) study is formulated to characterize, if any, the erosion of material due to ion bombardment in the proposed design. Designs to mitigate this damage can also be investigated for their effectiveness, in the future. Inductively Coupled Plasma (ICP) spiral antennas, driven by a Radio Frequency (RF) power source, have been proposed as the means to generate the ions required for the thruster design. A basic ICP flat-spiral antenna design, embedded within the LTCC substrate, will be used to ignite an argon plasma at low-pressure in a vacuum chamber, for duration tests of the LTCC substrate material. The DOE study includes the factors of chamber pressure, soak time, and supplied RF power. These factors are varied within two levels, and investigated for their contributions to erosion effects. The effects of the plasma exposure will be evaluated using optical profilometry or Scanning Electron Microscopy (SEM) techniques to determine the volume and depth of removed material, as well as the nature of the eroded surface. The results of the DOE study will be analyzed to develop a model of substrate erosion with respect to pressure, time, and power. Though this model may not be comprehensive, it can help to predict a maximum bound for the expected lifetime of a thruster operating at set conditions.

Original languageEnglish
Title of host publication5th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2009, CICMT 2009
Pages206-211
Number of pages6
StatePublished - 2009
Event5th International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2009 - Denver, CO, United States
Duration: 21 Apr 200923 Apr 2009

Publication series

Name5th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2009, CICMT 2009

Conference

Conference5th International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2009
Country/TerritoryUnited States
CityDenver, CO
Period21/04/0923/04/09

Keywords

  • Design of Experiments
  • DOE
  • Erosion
  • Low Temperature Co-fired Ceramics
  • LTCC
  • Plasma

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