TY - GEN
T1 - Fabrication of moving parts within an LTCC structure
AU - Engstrom, Gus
AU - Plumlee, D. G.
AU - Moll, A. J.
PY - 2007
Y1 - 2007
N2 - The variety and complexity of systems built using LTCC has increased greatly since its introduction. Originally intended as a platform for packaging electronic components, LTCC has been used in the development of microsensors, micro-systems and micro-propulsion devices. In the interest of exploring LTCC's flexibility as a building material, a process was developed for including moving parts within an LTCC structure. The moving components successfully included within an LTCC structure include gears, pushrods, and fluid propelled rotors. Shafts made of mono-crystalline sapphire have also been included into the structures in conjunction with these components. These shafts have been used to locate, power, and transmit the movement of the encased parts. The ability to embed movable features makes the design of complex systems such as compressors, turbines, and other micro-fluidic devices possible. In addition, the integration of these techniques with the electronic capabilities of LTCC provides a method to develop generators and other MEMS applications.
AB - The variety and complexity of systems built using LTCC has increased greatly since its introduction. Originally intended as a platform for packaging electronic components, LTCC has been used in the development of microsensors, micro-systems and micro-propulsion devices. In the interest of exploring LTCC's flexibility as a building material, a process was developed for including moving parts within an LTCC structure. The moving components successfully included within an LTCC structure include gears, pushrods, and fluid propelled rotors. Shafts made of mono-crystalline sapphire have also been included into the structures in conjunction with these components. These shafts have been used to locate, power, and transmit the movement of the encased parts. The ability to embed movable features makes the design of complex systems such as compressors, turbines, and other micro-fluidic devices possible. In addition, the integration of these techniques with the electronic capabilities of LTCC provides a method to develop generators and other MEMS applications.
KW - Ceramic powder setter sheets
KW - Low temperature co-fired ceramics (LTCC)
KW - Movable parts
KW - Sapphire tubing
UR - https://www.scopus.com/pages/publications/84878223603
M3 - Conference contribution
AN - SCOPUS:84878223603
SN - 9781605603872
T3 - International Microelectronics and Packaging Society - 3rd IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2007
SP - 324
EP - 328
BT - International Microelectronics and Packaging Society - 3rd IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2007
T2 - 3rd International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2007
Y2 - 23 April 2007 through 26 April 2007
ER -