Fabrication of three-dimensional photonic crystals by templated atomic layer deposition

Christopher J. Summers; Elton Graugnard; Davy P. Gaillot; John Blair

doi:10.1364/fio.2008.ftup4

Fabrication of three-dimensional photonic crystals by templated atomic layer deposition

Christopher J. Summers, Elton Graugnard, Davy P. Gaillot, John Blair

Micron School of Materials Science and Engineering

Georgia Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We report investigations of atomic layer deposition for 3D structure modification. Application to opal templates shows that dielectric inversion, large pore structures and conformal backfilling significantly enhance the photonic band gap and optical functionality.

Original language	English
Title of host publication	Frontiers in Optics, FiO 2008
DOIs	https://doi.org/10.1364/fio.2008.ftup4
State	Published - 2008
Event	Frontiers in Optics, FiO 2008 - Rochester, NY, United States Duration: 19 Oct 2008 → 23 Oct 2008

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Conference

Conference	Frontiers in Optics, FiO 2008
Country/Territory	United States
City	Rochester, NY
Period	19/10/08 → 23/10/08

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10.1364/fio.2008.ftup4

Cite this

@inproceedings{b3ad6ce7658c486db3cf8194afe6b2e4,

title = "Fabrication of three-dimensional photonic crystals by templated atomic layer deposition",

abstract = "We report investigations of atomic layer deposition for 3D structure modification. Application to opal templates shows that dielectric inversion, large pore structures and conformal backfilling significantly enhance the photonic band gap and optical functionality.",

author = "Summers, {Christopher J.} and Elton Graugnard and Gaillot, {Davy P.} and John Blair",

year = "2008",

doi = "10.1364/fio.2008.ftup4",

language = "English",

isbn = "9781557528612",

series = "Optics InfoBase Conference Papers",

booktitle = "Frontiers in Optics, FiO 2008",

note = "Frontiers in Optics, FiO 2008 ; Conference date: 19-10-2008 Through 23-10-2008",

}

TY - GEN

T1 - Fabrication of three-dimensional photonic crystals by templated atomic layer deposition

AU - Summers, Christopher J.

AU - Graugnard, Elton

AU - Gaillot, Davy P.

AU - Blair, John

PY - 2008

Y1 - 2008

N2 - We report investigations of atomic layer deposition for 3D structure modification. Application to opal templates shows that dielectric inversion, large pore structures and conformal backfilling significantly enhance the photonic band gap and optical functionality.

AB - We report investigations of atomic layer deposition for 3D structure modification. Application to opal templates shows that dielectric inversion, large pore structures and conformal backfilling significantly enhance the photonic band gap and optical functionality.

UR - http://www.scopus.com/inward/record.url?scp=85085776767&partnerID=8YFLogxK

U2 - 10.1364/fio.2008.ftup4

DO - 10.1364/fio.2008.ftup4

M3 - Conference contribution

AN - SCOPUS:85085776767

SN - 9781557528612

T3 - Optics InfoBase Conference Papers

BT - Frontiers in Optics, FiO 2008

T2 - Frontiers in Optics, FiO 2008

Y2 - 19 October 2008 through 23 October 2008

ER -

Fabrication of three-dimensional photonic crystals by templated atomic layer deposition

Abstract

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