@inproceedings{896eb7cb1fec49c2a5ee262ba3d9fd09,
title = "Feasibility of micro-plasma transistor devices in LTCC",
abstract = "The project determines if it is feasible to develop a novel micro-plasma transistor device (MPT) device in low Temperature Co-Fired ceramics (LTCC). LTCC is beneficial due to its material properties including the resistance to plasma erosion and ease in implementing circuits using multiple layers. The MPT device uses a double looped RF antenna to create plasma that is manipulated by electrodes imbedded in the LTCC using integrated 3D electronic circuits. The MPT device is fabricated using DuPont 951 LTCC tapes and the ceramic MEMS fabrication process. Current tests show results of successful creation of plasma and source/drain electrodes with varying hole and slit dimensions and operational parameters such as electrode configuration and voltage. The MPT device is being tested at BSU using a vacuum chamber and associated electronic hardware. Using the initial testing results, the feasibility of micro-plasma transistors in LTCC will be determined.",
keywords = "ICP, LTCC, Micro-plasma, Transistor",
author = "Brooke Garner and M. Mullner and Donald Plumlee",
year = "2013",
language = "English",
isbn = "9781629937182",
series = "9th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2013",
publisher = "IMAPS-International Microelectronics and Packaging Society",
pages = "118--123",
booktitle = "9th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2013",
address = "United States",
note = "9th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2013 ; Conference date: 23-04-2013 Through 25-04-2013",
}