Field Emitter Failure Mechanisms and Harsh Environment Robustness Studies

Rushmita Bhattacharjee, Cody Oberbeck, Jake West, Cesar Weasley Segura Del Rio, Winston Chern, Nedeljko Karaulac, Girish Rughoobur, Marco Turchetti, Matthew Yeung, Alberto Nardi, Wesley Britton, Luca Dal Negro, Ranajoy Bhattacharya, Phillip D. Keathley, Karl K. Berggren, Akintunde I. Akinwande, Jim Browning

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Modern day field emitters can fail due to several mechanisms that are not well understood. This paper presents experiments that aim to identify the mechanisms behind failure. Two types of devices, Silicon gated field emitter arrays (SiGFEAs) and Titanium Silicon Oxy Nitride (TiSiON) lateral field emitter devices were characterized experimentally. Si-GFEAs were tested for arc occurrence time for a fixed gate voltage of 50 V and a fixed collector voltage of 200 V. The emitter was grounded. Initial results from the temporal response experiment show that the emitter experiences arcing first. However, future experiments will provide an accurate identification of the arc initiating electrode. For the planar device, a diode was chosen and IV characterization was performed at 50 °C and 400 °C. Experiments showed that for an applied collector voltage of 10 V, the field emission current was ≈ 5.5 nA before the heat treatment and was ≈ 2.75 nA after the 400 °C heat treatment. This reduction in current could be attributed to the removal of water vapor by heat treatment resulting in the reduction in the surface leakage current.

Original languageEnglish
Title of host publication2024 Joint International Vacuum Electronics Conference and International Vacuum Electron Sources Conference, IVEC + IVESC 2024
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350348705
DOIs
StatePublished - 2024
Event25th Joint IEEE International Vacuum Electronics Conference and 15th International Vacuum Electron Sources Conference, IVEC + IVESC 2024 - Monterey, United States
Duration: 23 Apr 202425 Apr 2024

Publication series

Name2024 Joint International Vacuum Electronics Conference and International Vacuum Electron Sources Conference, IVEC + IVESC 2024

Conference

Conference25th Joint IEEE International Vacuum Electronics Conference and 15th International Vacuum Electron Sources Conference, IVEC + IVESC 2024
Country/TerritoryUnited States
CityMonterey
Period23/04/2425/04/24

Keywords

  • Si-GFEA
  • arc detection
  • high temperature treatment
  • planar field emitters

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