High Current Field Emission Arrays for Crossed-Field Device Experiments

Ranajoy Bhattacharya, Mason Canon, Rushmita Bhattacharjee, Winston Chern, Nedeljko Karaulac, Girish Rughoobur, Akintunde I. Akinwande, Jim Browning

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

Specially designed silicon gated field emitter array (SiGFEA) tips are used as large current electron sources for crossed-field device experiments. Thirty-six discrete field emitter arrays, each made of 100×100 tips, are integrated in to a single die using a mesh configuration for uniformity and reliability. The I-V characterization shows the devices are capable of producing current up to 5 mA at a gate voltage of 50 V and anode voltage of 200 V. However, after ultra-violet light exposure of 100 minutes, the anode current increases to > 50 mA. This enhancement can be attributed to the residual gas desorption stimulated by UV exposure. Eight such die are being integrated into a planar crossed-field device configuration with plans to use 32 die in a magnetron experiment.

Original languageAmerican English
Title of host publication2021 34th International Vacuum Nanoelectronics Conference (IVNC)
StatePublished - 1 Jan 2021

Keywords

  • field emitter arrays
  • logic gates
  • magnetic devices
  • reliability engineering
  • silicon
  • ultraviolet sources
  • voltage

EGS Disciplines

  • Electrical and Computer Engineering

Fingerprint

Dive into the research topics of 'High Current Field Emission Arrays for Crossed-Field Device Experiments'. Together they form a unique fingerprint.

Cite this