High Current Field Emission Arrays for Crossed-Field Device Experiments

Ranajoy Bhattacharya, Mason Cannon, Rushmita Bhattacharjee, Winston Chern, Nedeljko Karaulac, Girish Rughoobur, Akintunde I. Akinwande, Jim Browning

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Specially designed silicon gated field emitter array (SiGFEA) tips are used as large current electron sources for crossed-field device experiments. Thirty-six discrete field emitter arrays, each made of 100×100 tips, are integrated in to a single die using a mesh configuration for uniformity and reliability. The I-V characterization shows the devices are capable of producing current up to 5 mA at a gate voltage of 50 V and anode voltage of 200 V. However, after ultra-violet light exposure of 100 minutes, the anode current increases to > 50 mA. This enhancement can be attributed to the residual gas desorption stimulated by UV exposure. Eight such die are being integrated into a planar crossed-field device configuration with plans to use 32 die in a magnetron experiment.

Original languageEnglish
Title of host publication2021 34th International Vacuum Nanoelectronics Conference, IVNC 2021
EditorsStephen Purcell, Jean-Paul Mazellier
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665425896
DOIs
StatePublished - 2021
Event34th International Vacuum Nanoelectronics Conference, IVNC 2021 - Virtual, Lyon, France
Duration: 5 Jul 20219 Jul 2021

Publication series

Name2021 34th International Vacuum Nanoelectronics Conference, IVNC 2021

Conference

Conference34th International Vacuum Nanoelectronics Conference, IVNC 2021
Country/TerritoryFrance
CityVirtual, Lyon
Period5/07/219/07/21

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