Infiltration and Inversion of Holographically Defined Polymer Photonic Crystal Templates by Atomic Layer Deposition

Jeffrey S. King; Elton Graugnard; Olivia M. Roche; David N. Sharp; Jan Scrimgeour; Robert G. Denning; Andrew J. Turberfield; Christopher J. Summers

Infiltration and Inversion of Holographically Defined Polymer Photonic Crystal Templates by Atomic Layer Deposition

Jeffrey S. King, Elton Graugnard, Olivia M. Roche, David N. Sharp, Jan Scrimgeour, Robert G. Denning, Andrew J. Turberfield, Christopher J. Summers

Research output: Contribution to journal › Article › peer-review

84 Scopus citations

Abstract

Practical methods of microfabrication are vital for the development of photonic-crystal-based signal processing. However, extension of the optical methods that dominate integrated circuit fabrication to three dimensions is challenging. This communication reports an essential step for creation of devices operating within a full photonic band gap: atomic layer deposition is used to create the high-index TiO2 replicas of holographically defined photonic crystals shown in the figure.

Original language	American English
Journal	Advanced Materials
Volume	18
Issue number	12
State	Published - 1 Jun 2006
Externally published	Yes

Keywords

Atomic layer deposition
Chemical vapor deposition
Holography
Photonic crystals
Two-photon absorption

EGS Disciplines

Mechanical Engineering

Cite this

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title = "Infiltration and Inversion of Holographically Defined Polymer Photonic Crystal Templates by Atomic Layer Deposition",

abstract = " Practical methods of microfabrication are vital for the development of photonic-crystal-based signal processing. However, extension of the optical methods that dominate integrated circuit fabrication to three dimensions is challenging. This communication reports an essential step for creation of devices operating within a full photonic band gap: atomic layer deposition is used to create the high-index TiO2 replicas of holographically defined photonic crystals shown in the figure.",

keywords = "Atomic layer deposition, Chemical vapor deposition, Holography, Photonic crystals, Two-photon absorption",

author = "King, {Jeffrey S.} and Elton Graugnard and Roche, {Olivia M.} and Sharp, {David N.} and Jan Scrimgeour and Denning, {Robert G.} and Turberfield, {Andrew J.} and Summers, {Christopher J.}",

year = "2006",

month = jun,

day = "1",

language = "American English",

volume = "18",

number = "12",

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TY - JOUR

T1 - Infiltration and Inversion of Holographically Defined Polymer Photonic Crystal Templates by Atomic Layer Deposition

AU - King, Jeffrey S.

AU - Graugnard, Elton

AU - Roche, Olivia M.

AU - Sharp, David N.

AU - Scrimgeour, Jan

AU - Denning, Robert G.

AU - Turberfield, Andrew J.

AU - Summers, Christopher J.

PY - 2006/6/1

Y1 - 2006/6/1

N2 - Practical methods of microfabrication are vital for the development of photonic-crystal-based signal processing. However, extension of the optical methods that dominate integrated circuit fabrication to three dimensions is challenging. This communication reports an essential step for creation of devices operating within a full photonic band gap: atomic layer deposition is used to create the high-index TiO2 replicas of holographically defined photonic crystals shown in the figure.

AB - Practical methods of microfabrication are vital for the development of photonic-crystal-based signal processing. However, extension of the optical methods that dominate integrated circuit fabrication to three dimensions is challenging. This communication reports an essential step for creation of devices operating within a full photonic band gap: atomic layer deposition is used to create the high-index TiO2 replicas of holographically defined photonic crystals shown in the figure.

KW - Atomic layer deposition

KW - Chemical vapor deposition

KW - Holography

KW - Photonic crystals

KW - Two-photon absorption

UR - http://dx.doi.org/10.1002/adma.200502287

M3 - Article

VL - 18

JO - Advanced Materials

JF - Advanced Materials

IS - 12

ER -

Infiltration and Inversion of Holographically Defined Polymer Photonic Crystal Templates by Atomic Layer Deposition

Abstract

Keywords

EGS Disciplines

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