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Integration of IC industry feature sizes with university back-end-of-line post processing: Example using a phase-change memory test Chip

  • Jennifer Regner
  • , Mahesh Balasubramanian
  • , Beth Cook
  • , Yingting Li
  • , Hiwot Kassayebetre
  • , Anshika Sharma
  • , R. Jacob Baker
  • , Kristy A. Campbell
  • Boise State University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

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