Ion mobility spectrometer (IMS) fabricated in low temperature cofire ceramic (LTCC)

D. G. Plumlee; M. Tam; P. Dwivedi; H. H. Hill; J. Hartmann; A. J. Moll

Ion mobility spectrometer (IMS) fabricated in low temperature cofire ceramic (LTCC)

D. G. Plumlee, M. Tam, P. Dwivedi, H. H. Hill, J. Hartmann, A. J. Moll

Micron School of Materials Science and Engineering

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

Multilayer ceramic packaging technology holds considerable promise as a platform to fabricate sensors for chemical analysis in remote locations. This paper describes the development of low-cost, remotely deployed sensors to determine chemical contamination concentrations in groundwater. An Ion Mobility Spectrometer (IMS) sensor was designed and fabricated using Low Temperature Co-Fired Ceramic (LTCC) materials. The IMS measures the time of flight of an ion through an electric field at atmospheric pressure and correlates this time to a distinct chemical species. Current instruments are large, expensive, and have sizable power requirements. The LTCC IMS was designed for permanent deployment below ground to continuously analyze groundwater. Reduction in size and power consumption of the instrument was made possible by the novel use of LTCC packaging technology.

Original language	English
Pages (from-to)	240-245
Number of pages	6
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5231
State	Published - 2003
Event	Ceramic Interconnect Technology: The Next Generation - Denver, CO, United States Duration: 7 Apr 2003 → 9 Apr 2003

Keywords

C-MEMS
EPA
Groundwater
Ion mobility spectrometer
LTCC
Sensor

Cite this

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title = "Ion mobility spectrometer (IMS) fabricated in low temperature cofire ceramic (LTCC)",

abstract = "Multilayer ceramic packaging technology holds considerable promise as a platform to fabricate sensors for chemical analysis in remote locations. This paper describes the development of low-cost, remotely deployed sensors to determine chemical contamination concentrations in groundwater. An Ion Mobility Spectrometer (IMS) sensor was designed and fabricated using Low Temperature Co-Fired Ceramic (LTCC) materials. The IMS measures the time of flight of an ion through an electric field at atmospheric pressure and correlates this time to a distinct chemical species. Current instruments are large, expensive, and have sizable power requirements. The LTCC IMS was designed for permanent deployment below ground to continuously analyze groundwater. Reduction in size and power consumption of the instrument was made possible by the novel use of LTCC packaging technology.",

keywords = "C-MEMS, EPA, Groundwater, Ion mobility spectrometer, LTCC, Sensor",

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year = "2003",

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volume = "5231",

pages = "240--245",

note = "Ceramic Interconnect Technology: The Next Generation ; Conference date: 07-04-2003 Through 09-04-2003",

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TY - JOUR

T1 - Ion mobility spectrometer (IMS) fabricated in low temperature cofire ceramic (LTCC)

AU - Plumlee, D. G.

AU - Tam, M.

AU - Dwivedi, P.

AU - Hill, H. H.

AU - Hartmann, J.

AU - Moll, A. J.

PY - 2003

Y1 - 2003

N2 - Multilayer ceramic packaging technology holds considerable promise as a platform to fabricate sensors for chemical analysis in remote locations. This paper describes the development of low-cost, remotely deployed sensors to determine chemical contamination concentrations in groundwater. An Ion Mobility Spectrometer (IMS) sensor was designed and fabricated using Low Temperature Co-Fired Ceramic (LTCC) materials. The IMS measures the time of flight of an ion through an electric field at atmospheric pressure and correlates this time to a distinct chemical species. Current instruments are large, expensive, and have sizable power requirements. The LTCC IMS was designed for permanent deployment below ground to continuously analyze groundwater. Reduction in size and power consumption of the instrument was made possible by the novel use of LTCC packaging technology.

AB - Multilayer ceramic packaging technology holds considerable promise as a platform to fabricate sensors for chemical analysis in remote locations. This paper describes the development of low-cost, remotely deployed sensors to determine chemical contamination concentrations in groundwater. An Ion Mobility Spectrometer (IMS) sensor was designed and fabricated using Low Temperature Co-Fired Ceramic (LTCC) materials. The IMS measures the time of flight of an ion through an electric field at atmospheric pressure and correlates this time to a distinct chemical species. Current instruments are large, expensive, and have sizable power requirements. The LTCC IMS was designed for permanent deployment below ground to continuously analyze groundwater. Reduction in size and power consumption of the instrument was made possible by the novel use of LTCC packaging technology.

KW - C-MEMS

KW - EPA

KW - Groundwater

KW - Ion mobility spectrometer

KW - LTCC

KW - Sensor

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M3 - Conference article

AN - SCOPUS:0042329631

SN - 0277-786X

VL - 5231

SP - 240

EP - 245

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Ceramic Interconnect Technology: The Next Generation

Y2 - 7 April 2003 through 9 April 2003

ER -

Ion mobility spectrometer (IMS) fabricated in low temperature cofire ceramic (LTCC)

Abstract

Keywords

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