LTCC MEMS Fabrication for High Temperature Vacuum Applications

  • Patricio Sainz
  • , Jim Browning
  • , Ranajoy Bhattacharya
  • , Russell Briggs

Research output: Contribution to conferencePoster

Abstract

Low temperature co-fired ceramic (LTCC) is a packaging material that has a strong resistance to high temperatures and harsh chemical environments. It is capable of creating a fully hermetic seal around any embedded circuitry, which makes it an ideal material for use in high temperature vacuum applications. However, the conductive pastes designed to be cofired with the LTCC are not rated for high temperature (up to 400°C) in a vacuum, so they are not suitable for designs that require conductors to be exposed to the external environment. The primary solution to this problem is the implementation of specialized conductive materials and sealants, but the use of these materials required the development of a new fabrication process because they are not designed to be directly compatible with LTCC.

Original languageAmerican English
StatePublished - 21 Apr 2023
Event2023 Undergraduate Research Showcase - Boise State University, Boise, United States
Duration: 21 Apr 2023 → …
https://scholarworks.boisestate.edu/under_showcase_2023

Conference

Conference2023 Undergraduate Research Showcase
Abbreviated title2023 URS
Country/TerritoryUnited States
CityBoise
Period21/04/23 → …
Internet address

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