Mini- and micro-channel devices in LTCC

The miniaturization of analytical instruments and packaging of novel sensors is an area that has attracted significant research interest and offers many opportunities for product commercialization. In order for LTCC to be a successful medium for small scale sensors or lab-in-package devices, fluid flow through channels and inlet/outlet ports must be perfected. Device inlet/outlet ports have been demonstrated by embedding sapphire tubes in LTCC, allowing external connections using compression fittings. Research is ongoing on different methods of fabricating channels and cavities through the use of sacrificial carbon tapes and pastes, as well as developing methods for die attach of silicon sensors into the package. Pressure and flow characteristics through mini-channels including methods of fabrication are presented.