Abstract
Surface acoustic wave (SAW) devices consisting of interdigitated transducers printed on piezoelectric substrates have resulted in low-cost, low-power, and small-footprint thermometers for high temperature and radioactive environments. This study developed temperature-dependent finite element models in both time- and frequencydomain. Modeling accuracy was evaluated using an aerosol-jet printed SAW thermometer measured from room temperature to 200 Celsius. Time-domain simulation results enabled acoustic wave propagation visualization and successfully guided the signal denoising of measured scattering parameters. Frequency-domain simulation accurately predicted the temperature-driven natural frequency drift in SAW transducers while maintaining high computational efficiency. The models developed in this study will facilitate computer-aided design of future SAW transducers and expand their applications in harsh environments.
Original language | American English |
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Title of host publication | Proceedings of SPIE |
State | Published - 1 Jan 2022 |
Keywords
- COMSOL Multiphysics
- lithium niobate
- piezoelectric materials
- surface acoustic wave
EGS Disciplines
- Biomedical Engineering and Bioengineering
- Mechanical Engineering