Nucleation and Growth of Molybdenum Disulfide Grown by Thermal Atomic Layer Deposition on Metal Oxides

Jake Soares; Steven Letourneau; Matthew Lawson; Anil U. Mane; Yu Lu; Yaqiao Wu; Steven M. Hues; Lan Li; Jeffrey W. Elam; Elton Graugnard

Nucleation and Growth of Molybdenum Disulfide Grown by Thermal Atomic Layer Deposition on Metal Oxides

Jake Soares, Steven Letourneau, Matthew Lawson, Anil U. Mane, Yu Lu, Yaqiao Wu, Steven M. Hues, Lan Li, Jeffrey W. Elam, Elton Graugnard

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Original language	American English
Journal	Journal of Vacuum Science & Technology A
State	Published - 1 Dec 2022

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Materials Science and Engineering

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Nucleation and Growth of Molybdenum Disulfide Grown by Thermal AtFinal published version, 5.22 MBLicense: Unspecified
Nucleation and Growth of Molybdenum Disulfide Grown by Thermal AtFinal published version, 5.22 MBLicense: Unspecified

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title = "Nucleation and Growth of Molybdenum Disulfide Grown by Thermal Atomic Layer Deposition on Metal Oxides",

author = "Jake Soares and Steven Letourneau and Matthew Lawson and Mane, {Anil U.} and Yu Lu and Yaqiao Wu and Hues, {Steven M.} and Lan Li and Elam, {Jeffrey W.} and Elton Graugnard",

year = "2022",

month = dec,

day = "1",

language = "American English",

}

TY - JOUR

T1 - Nucleation and Growth of Molybdenum Disulfide Grown by Thermal Atomic Layer Deposition on Metal Oxides

AU - Soares, Jake

AU - Letourneau, Steven

AU - Lawson, Matthew

AU - Mane, Anil U.

AU - Lu, Yu

AU - Wu, Yaqiao

AU - Hues, Steven M.

AU - Li, Lan

AU - Elam, Jeffrey W.

AU - Graugnard, Elton

PY - 2022/12/1

Y1 - 2022/12/1

UR - https://scholarworks.boisestate.edu/mse_facpubs/538

M3 - Article

JO - Journal of Vacuum Science & Technology A

JF - Journal of Vacuum Science & Technology A

ER -

Nucleation and Growth of Molybdenum Disulfide Grown by Thermal Atomic Layer Deposition on Metal Oxides

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