Photonic band gap response of structurally modified non-close-packed inverse opals by template directed multi-layer atomic layer deposition

We report the controllable and tunable fabrication of structurally modified non-close-packed inverse shell opals using multi-layer atomic layer deposition and present a model and simulation algorithm to calculate the structural parameters critical to fabrication. This powerful, flexible and unique technique enables opal inversion, structural modification and backfilling and was applied to the fabrication of TiO₂ non-close-packed inverse opals. Using successive conformal backfilling it was possible to tune the Bragg peak over 600 nm and enhance the Bragg peak width by >50%. Additionally, band structure calculations, using dielectric functions approximating the true network topology, were used to predict the optical properties during the fabrication process. 3D finite-difference-time-domain results predict experimentally achievable structures with a complete band gap as large as 7.2%. Additionally, the refractive index requirement was predicted to decrease from 3.3 in an 86% infiltrated inverse shell opal to 3.0 in an optimized non-close-packed inverse shell opal. It was also shown for these structures that the complete photonic band gap peak can be statically tuned by over 70% by increasing the backfilled thickness.