Abstract
A bottom-up process for fabricating 2D photonic crystal (PC) slabs starting with patterned ZnO nanorod arrays that were conformally coated with TiO 2 by template-assisted atomic layer deposition (ALD) was discussed. The space between the ZnO nanorods was partially filled with TiO2, thus forming a continuous ZnO/TiO2 matrix with a highly ordered air-hole array. The periodic structure showed a reflection peak close to the theoretically predicted bandgap region. It was shown that the technique is a self-assembly process that is entirely bottom-up and can be effectively and economically scaled up for large-sized 2D PC fabrication.
Original language | American English |
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Pages (from-to) | 2103-2106 |
Number of pages | 4 |
Journal | Advanced Materials |
Volume | 17 |
Issue number | 17 |
DOIs | |
State | Published - Sep 2005 |
Keywords
- Nanopatterning
- Nanowires, inorganic
- Photonic crystals
- Titania
- zinc oxide
EGS Disciplines
- Mechanical Engineering