Polymer Thickness Effects on Bosch Etch Profiles

C. J. D. Craigie, T. Sheehan, V. N. Johnson, S. L. Burkett, Amy J. Moll, W. B. Knowlton

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
JournalMaterials Science and Engineering Faculty Publications and Presentations
StatePublished - 1 Nov 2002

EGS Disciplines

  • Materials Science and Engineering

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