Replicated Photonic Crystals by Atomic Layer Deposition within Holographically Defined Polymer Templates

Elton Graugnard; O. M. Roche; S. N. Dunham; J. S. King; D. N. Sharp; R. G. Denning; A. J. Turberfield; C. J. Summers

doi:10.1063/1.3159834

Replicated Photonic Crystals by Atomic Layer Deposition within Holographically Defined Polymer Templates

Elton Graugnard, O. M. Roche, S. N. Dunham, J. S. King, D. N. Sharp, R. G. Denning, A. J. Turberfield, C. J. Summers

Micron School of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

We report the replication of holographically defined photonic crystals using multistage atomic layer deposition. Low- and high-temperature atomic layer depositions were combined with selective etching to deposit and remove multiple conformal thin films within three-dimensional polymer templates. Using intermediate Al ₂ O ₃ inverse replicas, temperature- sensitive SU-8 photonic crystal templates were faithfully replicated with TiO ₂ and GaP, greatly increasing the dielectric contrasts of the photonic crystals. Optical measurements are in good agreement with the calculated band structures.

Original language	American English
Article number	263109
Journal	Applied Physics Letters
Volume	94
Issue number	26
DOIs	https://doi.org/10.1063/1.3159834
State	Published - 29 Jun 2009

Keywords

atomic layer deposition
band structure
holography
optical materials

EGS Disciplines

Materials Science and Engineering

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10.1063/1.3159834

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@article{239b4353eac34d369eff91cab4fdd4d8,

title = "Replicated Photonic Crystals by Atomic Layer Deposition within Holographically Defined Polymer Templates",

abstract = "We report the replication of holographically defined photonic crystals using multistage atomic layer deposition. Low- and high-temperature atomic layer depositions were combined with selective etching to deposit and remove multiple conformal thin films within three-dimensional polymer templates. Using intermediate Al 2 O 3 inverse replicas, temperature- sensitive SU-8 photonic crystal templates were faithfully replicated with TiO 2 and GaP, greatly increasing the dielectric contrasts of the photonic crystals. Optical measurements are in good agreement with the calculated band structures.",

keywords = "atomic layer deposition, band structure, holography, optical materials",

author = "Elton Graugnard and Roche, \{O. M.\} and Dunham, \{S. N.\} and King, \{J. S.\} and Sharp, \{D. N.\} and Denning, \{R. G.\} and Turberfield, \{A. J.\} and Summers, \{C. J.\}",

year = "2009",

month = jun,

day = "29",

doi = "10.1063/1.3159834",

language = "American English",

volume = "94",

number = "26",

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TY - JOUR

T1 - Replicated Photonic Crystals by Atomic Layer Deposition within Holographically Defined Polymer Templates

AU - Graugnard, Elton

AU - Roche, O. M.

AU - Dunham, S. N.

AU - King, J. S.

AU - Sharp, D. N.

AU - Denning, R. G.

AU - Turberfield, A. J.

AU - Summers, C. J.

PY - 2009/6/29

Y1 - 2009/6/29

N2 - We report the replication of holographically defined photonic crystals using multistage atomic layer deposition. Low- and high-temperature atomic layer depositions were combined with selective etching to deposit and remove multiple conformal thin films within three-dimensional polymer templates. Using intermediate Al 2 O 3 inverse replicas, temperature- sensitive SU-8 photonic crystal templates were faithfully replicated with TiO 2 and GaP, greatly increasing the dielectric contrasts of the photonic crystals. Optical measurements are in good agreement with the calculated band structures.

AB - We report the replication of holographically defined photonic crystals using multistage atomic layer deposition. Low- and high-temperature atomic layer depositions were combined with selective etching to deposit and remove multiple conformal thin films within three-dimensional polymer templates. Using intermediate Al 2 O 3 inverse replicas, temperature- sensitive SU-8 photonic crystal templates were faithfully replicated with TiO 2 and GaP, greatly increasing the dielectric contrasts of the photonic crystals. Optical measurements are in good agreement with the calculated band structures.

KW - atomic layer deposition

KW - band structure

KW - holography

KW - optical materials

UR - https://www.scopus.com/pages/publications/67649998685

UR - https://scholarworks.boisestate.edu/mse_facpubs/23

U2 - 10.1063/1.3159834

DO - 10.1063/1.3159834

M3 - Article

SN - 0003-6951

VL - 94

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 26

M1 - 263109

ER -

Replicated Photonic Crystals by Atomic Layer Deposition within Holographically Defined Polymer Templates

Abstract

Keywords

EGS Disciplines

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