Structural Evolution of Molybdenum Disulfide Prepared by Atomic Layer Deposition for Realization of Large Scale Films in Microelectronic Applications

Steven Letourneau, Elton Graugnard, Matthias J. Young, Nicholas M. Bedford, Yang Ren, Angel Yanguas-Gil, Anil U. Mane, Jeffrey W. Elam

Research output: Contribution to journal › Article › peer-review

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