The Design and Testing of Fluidic Oscillators made in LTCC

David P. Müllner, Donald G. Plumlee

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

Abstract

The interest in using fluidic devices as replacements for electronic logic circuit devices has seen renewed interest as NASA looks for ways to operate in harsh interplanetary environments. The size, multi-layer capabilities and ability to incorporate fluidic channels in a ceramic substrate make Low Temperature Co-Fired Ceramics (LTCC) a viable platform for development of these fluidic devices. Fluidic oscillators and fluidic diodes are being developed at BSU in LTCC. Fluidic oscillators can be used for measuring flow rates, fluid viscosity as well as a replacement for electronic oscillators. Fluidic diodes can be used as check-valves or as replacements for electronic diodes. In this work, we will describe the development and testing of a fluidic oscillator in LTCC. To produce a fluidic oscillator the standard C-MEMS fabrication process is used. A CNC milling machine was used to create the internal geometry. This allows the maximum flexibility in channel geometry. The top layer of each device will be fabricated using a clear material (lexan, sapphire or glass) to allow visual observation of the fluidic flows in each device. Additional testing will be performed by measuring pressure at the inlet and both outlets. Several different design geometries will be produced and observed to determine how performance varies with geometry. Two options are considered in the moment. In this report, a variety of designs will be presented and tested. Device performance will be determined by observing oscillation speed, at equal input pressure.

Original languageAmerican English
Title of host publication7th IMAPS/AcerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies
Pages210-212
Number of pages3
StatePublished - 2011

Publication series

Name7th IMAPS/AcerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies

Keywords

  • design specifcations
  • fluidic oscillators
  • production of the device

EGS Disciplines

  • Materials Science and Engineering

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