The formation of InAs quantum dots in an aluminum oxide matrix

D. A. Tenne, O. R. Bajutova, A. K. Bakarov, A. K. Kalagin, A. G. Milekhin, A. I. Toropov, D. R.T. Zahn

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

The formation of InAs quantum dots in an aluminum oxide matrix by selective oxidation of AlAs layers in an InAs/AlAs heterostructure is studied. According to the Raman spectroscopy data, the process of selective oxidation leads to stress relaxation in the InAs quantum dots and to the formation of amorphous arsenic at the boundary between oxidized and unoxidized regions.

Original languageEnglish
Pages (from-to)554-556
Number of pages3
JournalTechnical Physics Letters
Volume28
Issue number7
DOIs
StatePublished - 1 Jul 2002

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