Abstract
The formation of InAs quantum dots in an aluminum oxide matrix by selective oxidation of AlAs layers in an InAs/AlAs heterostructure is studied. According to the Raman spectroscopy data, the process of selective oxidation leads to stress relaxation in the InAs quantum dots and to the formation of amorphous arsenic at the boundary between oxidized and unoxidized regions.
Original language | English |
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Pages (from-to) | 554-556 |
Number of pages | 3 |
Journal | Technical Physics Letters |
Volume | 28 |
Issue number | 7 |
DOIs | |
State | Published - 1 Jul 2002 |