The Response of a Microwave Multipolar Bucket Plasma to a High Voltage Pulse

Shu Qin, Chung Chan, Nicol E. McGruer, Jim Browning, Keith Warner

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

A collisional model that describes the response of a microwave multipolar bucket plasma to a high voltage pulse has been developed for plasma source ion implantation (PSII). Measurement of the sheath position and target current in a 100 mtorr helium plasma are found to be consistent with the model. Sheath thicknesses predicted by the collisional model are significantly less than those predicted by similar noncollisional models.

Original languageEnglish
Pages (from-to)1272-1278
Number of pages7
JournalIEEE Transactions on Plasma Science
Volume19
Issue number6
DOIs
StatePublished - Dec 1991

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