Thermal analysis of bond layer influence on performance of an all-active vertically coupled, microring resonating laser

A. S. Fleischer, U. Troppenz, M. Hamacher, W. John

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

The vertical coupling of active InP based ring resonators and passive feeding waveguides necessitates the use of a waferbonding technology in the fabrication process. The required bond material (BCB) has a low thermal conductivity and will strongly influence the operating temperature and thus the performance of the ring resonator through its insulating effect. A comprehensive thermal analysis of a proposed vertically coupled ring resonator of 50 μm outer radius is undertaken during the design phase to determine the thermal impact of: the design of the wafer bond, the design of the passivation layer and the optical power levels. Thermal abatement strategies for semiconductor lasers are presented.

Original languageEnglish
Pages (from-to)421-431
Number of pages11
JournalMicroelectronics Reliability
Volume46
Issue number2-4
DOIs
StatePublished - Feb 2006
Externally publishedYes

Fingerprint

Dive into the research topics of 'Thermal analysis of bond layer influence on performance of an all-active vertically coupled, microring resonating laser'. Together they form a unique fingerprint.

Cite this