Towards Integration of FTIR Spectrometer to ALD System for in situ Characterization of ALD Processes

Anthony Donegan; Elton Graugnard; Hector Mendez-Gracia; Steven Hues

Towards Integration of FTIR Spectrometer to ALD System for in situ Characterization of ALD Processes

Anthony Donegan, Elton Graugnard, Hector Mendez-Gracia, Steven Hues

Micron School of Materials Science and Engineering

Boise State University

Research output: Contribution to conference › Presentation

Abstract

This project is the integration of a Nicolet Magna 550 FTIR Machine into the FTIR Systems at BSU in order to observe ALD processes in real time. This will prove useful in the growth of ALD films. At the time of writing, this project is still in progress.

Original language	American English
State	Published - 12 Jul 2022

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@conference{e73faf9c69e8478590f2f85eb2051850,

title = "Towards Integration of FTIR Spectrometer to ALD System for in situ Characterization of ALD Processes",

abstract = " This project is the integration of a Nicolet Magna 550 FTIR Machine into the FTIR Systems at BSU in order to observe ALD processes in real time. This will prove useful in the growth of ALD films. At the time of writing, this project is still in progress.",

author = "Anthony Donegan and Elton Graugnard and Hector Mendez-Gracia and Steven Hues",

year = "2022",

month = jul,

day = "12",

language = "American English",

}

TY - CONF

T1 - Towards Integration of FTIR Spectrometer to ALD System for in situ Characterization of ALD Processes

AU - Donegan, Anthony

AU - Graugnard, Elton

AU - Mendez-Gracia, Hector

AU - Hues, Steven

PY - 2022/7/12

Y1 - 2022/7/12

N2 - This project is the integration of a Nicolet Magna 550 FTIR Machine into the FTIR Systems at BSU in order to observe ALD processes in real time. This will prove useful in the growth of ALD films. At the time of writing, this project is still in progress.

AB - This project is the integration of a Nicolet Magna 550 FTIR Machine into the FTIR Systems at BSU in order to observe ALD processes in real time. This will prove useful in the growth of ALD films. At the time of writing, this project is still in progress.

M3 - Presentation

ER -

Towards Integration of FTIR Spectrometer to ALD System for in situ Characterization of ALD Processes

Abstract

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