Towards Integration of FTIR Spectrometer to ALD System for in situ Characterization of ALD Processes

Anthony Donegan; Elton Graugnard; Hector Mendez-Gracia; Steven Hues

Towards Integration of FTIR Spectrometer to ALD System for in situ Characterization of ALD Processes

Anthony Donegan
, Elton Graugnard
, Hector Mendez-Gracia
, Steven Hues

Micron School of Materials Science and Engineering

Boise State University

Research output: Contribution to conference › Poster

Abstract

This project is the integration of a Nicolet Magna 550 FTIR Machine into the FTIR Systems at BSU in order to observe ALD processes in real time. This will prove useful in the growth of ALD films. At the time of writing, this project is still in progress.

Original language	American English
State	Published - 1 Jul 2022
Event	Idaho Conference on Undergraduate Research 2022 - Boise State University, Boise, United States Duration: 1 Jul 2022 → … https://scholarworks.boisestate.edu/icur/2022/

Conference

Conference	Idaho Conference on Undergraduate Research 2022
Abbreviated title	ICUR 2022
Country/Territory	United States
City	Boise
Period	1/07/22 → …
Internet address	https://scholarworks.boisestate.edu/icur/2022/

Cite this

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title = "Towards Integration of FTIR Spectrometer to ALD System for in situ Characterization of ALD Processes",

abstract = " This project is the integration of a Nicolet Magna 550 FTIR Machine into the FTIR Systems at BSU in order to observe ALD processes in real time. This will prove useful in the growth of ALD films. At the time of writing, this project is still in progress.",

author = "Anthony Donegan and Elton Graugnard and Hector Mendez-Gracia and Steven Hues",

year = "2022",

month = jul,

day = "1",

language = "American English",

note = "Idaho Conference on Undergraduate Research 2022, ICUR 2022 ; Conference date: 01-07-2022",

url = "https://scholarworks.boisestate.edu/icur/2022/",

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TY - CONF

T1 - Towards Integration of FTIR Spectrometer to ALD System for in situ Characterization of ALD Processes

AU - Donegan, Anthony

AU - Graugnard, Elton

AU - Mendez-Gracia, Hector

AU - Hues, Steven

PY - 2022/7/1

Y1 - 2022/7/1

N2 - This project is the integration of a Nicolet Magna 550 FTIR Machine into the FTIR Systems at BSU in order to observe ALD processes in real time. This will prove useful in the growth of ALD films. At the time of writing, this project is still in progress.

AB - This project is the integration of a Nicolet Magna 550 FTIR Machine into the FTIR Systems at BSU in order to observe ALD processes in real time. This will prove useful in the growth of ALD films. At the time of writing, this project is still in progress.

UR - https://scholarworks.boisestate.edu/icur/2022/poster_session/134/

M3 - Poster

T2 - Idaho Conference on Undergraduate Research 2022

Y2 - 1 July 2022

ER -

Towards Integration of FTIR Spectrometer to ALD System for in situ Characterization of ALD Processes

Abstract

Conference

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