Zielpraeparation von TEM-Proben mit dem fokussierten Ionenstrahl (FIB)

In recent years, the Focused Ion Beam (FIB) Systems have been developed to now become important instruments in materials science. Their use, however, is still not widespread. This article reports on the possible uses of the FIB in the preparation of specimens for the Transmission Electron Microscope (TEM). Because of the ability to use the FIB as a microscope, it becomes possible to select areas for preparation only a few hundred nanometres in size. A further advantage compared with conventional methods of preparation is also the relatively short preparation time this technique offers.